General mechanical vacuum pump working principle

1. CG-17 glass three-stage high-vacuum oil diffusion pump and its working principle GG-17 has low glass expansion coefficient, can better withstand high temperature difference, so the pump can withstand higher temperature than the same type of pump. Longer life. The pump is suitable for the electronics industry, such as electron tubes. kinescope. X-ray tube, and smelting and purification of semiconductor monocrystalline silicon, high-boiling oil distillation purification separation, fluorescent lamps, high-vacuum vacuum flask exhaust equipment. Working principle: The system is first pumped by a rotating vacuum pump to 10~2Pa. The diffusion pump oil is heated and boiled. The oil vapor flow from the ejected gas continuously brings the gas molecules in the system to the side arm elbow bulb of the pump to be assembled. The gas density is pumped out by reaching the working range of the mechanical vacuum pump, thereby gradually obtaining a high vacuum.

2. Working principle of water ring vacuum pump/liquid ring vacuum pump The water ring vacuum pump (abbreviated as water ring pump) is a crude vacuum pump. The ultimate vacuum it can obtain is 2000-4000Pa, and the serial atmospheric ejector can reach 270-670Pa. The water ring pump can also be used as a compressor, which is called a water ring compressor and is a low pressure compressor with a pressure range of 1 to 2×10 5 Pa gauge pressure. The water ring pump was originally used as a self-priming pump and gradually used in many industrial sectors such as petroleum, chemicals, machinery, mining, light industry, medicine and food. In many industrial processes such as vacuum filtration, vacuum diversion, vacuum feeding, vacuum evaporation, vacuum concentration, vacuum rejuvenation, and vacuum degassing, water ring pumps are widely used. Due to the rapid development of vacuum application technology, water ring pumps have always been valued by people for obtaining rough vacuum. Since the gas compression in the water ring pump is isothermal, flammable and explosive gases can be extracted. In addition, dust-containing and water-containing gases can be pumped out. Therefore, water ring pumps are increasingly used. The pump body is filled with a suitable amount of water as a working fluid. When the impeller rotates in the clockwise direction in the figure, the water is thrown around by the impeller. Due to the centrifugal force, the water forms an approximately equal thickness closed loop that depends on the shape of the pump chamber. The inner surface of the lower part of the water ring is just tangent to the impeller hub, and the upper inner surface of the water ring is just in contact with the tip of the blade (actually, the blade has a certain insertion depth in the water ring). At this time, a crescent-shaped space is formed between the impeller hub and the water ring, and this space is divided into several small cavities equal to the number of blades by the impeller. If the starting point of the lower part of the impeller is 0°, then the volume of the small cavity will increase from small to large when the impeller rotates 180°, and it will communicate with the suction port on the end face. At this time, the gas is sucked in. When the suction is finished, the small cavity It is isolated from the suction port; when the impeller continues to rotate, the small cavity changes from large to small and the gas is compressed; when the small cavity communicates with the exhaust port, the gas is discharged from the pump. In summary, the water ring pump is based on the change in the volume of the pump chamber to achieve suction, compression and exhaust, so it is a variable-capacity vacuum pump. Roots pump works: Roots pump in the pump chamber, there are two '8'-shaped rotor mounted on a pair of parallel shafts perpendicular to each other, a pair of gears with a transmission ratio of 1 with the action of the reverse of each other Synchronous rotary motion. Between the rotors, there is a certain clearance between the rotor and the inner wall of the pump casing, which can realize high-speed operation. Since the Roots pump is a vacuum pump with no internal compression and usually has a very low compression ratio, high and medium vacuum pumps require a foreline pump. The ultimate vacuum of a Roots pump depends on the structure and manufacturing accuracy of the pump itself and on the ultimate vacuum of the foreline pump. In order to increase the ultimate vacuum of the pump, a Roots pump can be used in series.

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